Abstract: ZnO thin films have been deposited onto the glass substrates by the chemical bath deposition method. In this work we have studied the structural and morphological properties of ZnO thin films prepared by chemical bath deposition method. Zinc acetate dihydrate was used as the precursor material. The structural and morphological properties of the films have been investigated by X-ray diffraction and atomic force microscopy characterization methods. Scherrer’s formula was used to calculate particle size. The thin films have (002) as the preferred orientation. The root mean square roughness of the films was calculated.

Keywords: Zinc oxide film, chemical bath deposition, Particle size, AFM.